Figure 2: X-ray static rocking curve of fabricated torsional 75-kHz MEMS device.
From: X-ray photonic microsystems for the manipulation of synchrotron light
(a) The scanning electron microscopy of 25-μm thick 75-kHz MEMS with rounded edges shows the diffractive crystal surface, the comb-drive actuators and torsional flexures. (b) The normalized static rocking curve measured at 8 keV shows a prominent Si(400) diffraction peak with nearly 50% reflectivity and broad peaks on the right, which originate from the lattice strain due to the dopant layer discussed in the text. Future fabrication will eliminate this dopant layer during the manufacturing process.
