Figure 4: MEMS dynamic performance of the MEMS diffractive optics.
From: X-ray photonic microsystems for the manipulation of synchrotron light
(a) Normalized angular velocity over one oscillating cycle of MEMS, where ωmax=1.261° μs−1. (b) The experimental data in the time domain where the position and intensity of the 8-keV diffracted X-ray peaks (locally expanded along the time axis by a factor of 20) over the one cycle of the oscillation period are plotted as a function of time and the values of Δθ=θB−θ0. A magnified diffraction profile (at Δθ=0.8°) is shown in the inset. The diffracted peak is narrowest when Δθ=0°. The mirror image of diffraction profiles on the two branches of motion highlights the symmetric rotation of the MEMS. (c) The measured time-gap (Δtg) between the X-ray pulses fits perfectly with equation 2 when the maximum value of the MEMS deflection amplitude is ±2.69°. (d) The width, Δtw, of Si(400) diffraction peak obtained from the time-domain diffraction profiles analysed using the 3-Gaussian model (see text) shown as a function of Δθ. Near Δθ=0° (shaded), the measured values (dots) agree well with calculation using equation 3 (line) with no fitting parameter.
