Supplementary Figure 3: Lateral resolution measurement for the focused GCIB primary ion beam (with the secondary ion extraction potential off). | Nature Methods

Supplementary Figure 3: Lateral resolution measurement for the focused GCIB primary ion beam (with the secondary ion extraction potential off).

From: The 3D OrbiSIMS—label-free metabolic imaging with subcellular lateral resolution and high mass-resolving power

Supplementary Figure 3

A) Ion induced secondary electron image of an electroformed mesh grid over a hole obtained with the Ar3000+ primary ion beam. Red lines along the x and y axes denote the location of linescans used to measure the resolution. B and C) Representative line scans of the secondary electron intensity across the edge of the grid for the x-axis and y-axis, respectively. D) The distribution of the FWHM lateral resolution measurements with a fit to a normal distribution function (dotted line, bin size 0.1 μm). The average FWHM lateral resolution was 1.72 μm ± 0.24 μm (μ ± 1σ) (n=246, grey bars) across the x-axis and 1.04 μm ± 0.16 μm (μ ± 1σ) (n=246, red bars) across the y-axis. Results presented are from a single image.

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