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Silicon nanodevices

Spotting the atoms

Nature Nanotechnology (2007)Cite this article

Atom probe tomography allows researchers to identify the tiny defects in crystal lattices that could affect the performance of silicon nanodevices

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References

  1. Thompson, K. Flaitz, P. L. Ronsheim, P. Larson, D. J. & Kelly, T. F. Imaging of arsenic Cottrell atmospheres around silicon defects by three-dimensional atom probe tomography. Science 317, 1370–1374 10.1126/science.1145428 (2007).

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Authors
  1. Tim Reid
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Reid, T. Spotting the atoms. Nature Nanotech (2007). https://doi.org/10.1038/nnano.2007.335

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  • DOI: https://doi.org/10.1038/nnano.2007.335

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