Table 4 Comparison of reference target measurements, sample no. 513E by Rubert & Co [41], as depicted in Fig. 6
Groove | Exp. depth | NPS | MS-OCT | Std-Res 3D scan | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
\(\Delta\) (\(\upmu \hbox {m}\)) | N | \(\sigma\) (\(\upmu \hbox {m}\)) | \(\Delta\) (\(\upmu \hbox {m}\)) | Err. (\(\upmu \hbox {m}\)) | N | \(\sigma\) (\(\upmu \hbox {m}\)) | \(\Delta\) (\(\upmu \hbox {m}\)) | Err. (\(\upmu \hbox {m}\)) | N | \(\sigma\) (\(\upmu \hbox {m}\)) | |
1 (t) | 1000 | 1220 | 0.22 | 984 | N/A | 250 | 7.4 | 982 | \(-\)2 | 22.5k | 15.0 |
1 (b) | 20 | 0.05 | 250 | 6.2 | 150 | 9.2 | |||||
2 (t) | 500 | 1050 | 0.42 | 496 | N/A | 400 | 5.8 | 490 | \(-\)6 | 10.5k | 10.2 |
2 (b) | 10 | 0.12 | 300 | 1.6 | 2400 | 17.7 | |||||
3 (t) | 200 | 910 | 0.21 | 195 | N/A | 990 | 4.5 | 194 | \(-\)1 | 12k | 10.3 |
3 (b) | 200 | 0.08 | 550 | 1.4 | 7500 | 9.3 | |||||
4 (t) | 30 | 1100 | 0.21 | 29 | N/A | 600 | 3.0 | 29 | 0 | 4500 | 10.8 |
4 (b) | 10 | 0.05 | 400 | 4.1 | 750 | 10.4 |
Groove | Exp. depth | Std-Res 3D scan | High-Res 3D scan | 3D digital microscopy | |||||||
---|---|---|---|---|---|---|---|---|---|---|---|
\(\Delta\) (\(\upmu \hbox {m}\)) | \(\Delta\) (\(\upmu \hbox {m}\)) | Err. (\(\upmu \hbox {m}\)) | N | \(\sigma\) (\(\upmu \hbox {m}\)) | \(\Delta\) (\(\upmu \hbox {m}\)) | Err. (\(\upmu \hbox {m}\)) | N | \(\sigma\) (\(\upmu \hbox {m}\)) | \(\Delta\) (\(\upmu \hbox {m}\)) | Err. (\(\upmu \hbox {m}\)) | |
1 (t) | 1000 | 972 | − 12 | 7000 | 12.9 | 987 | 3 | 340k | 3.5 | 987 | 3 |
1 (b) | 2250 | 8.6 | 240k | 3.1 | |||||||
2 (t) | 500 | 520 | 24 | 7750 | 12.2 | 496 | 0 | 348k | 2.5 | 496 | 0 |
2 (b) | 1000 | 7.2 | 228k | 3.8 | |||||||
3 (t) | 200 | 206 | 11 | 2250 | 8.6 | 206 | 11 | 560k | 3.2 | 194 | − 1 |
3 (b) | 7000 | 8.3 | 456k | 3.4 | |||||||
4 (t) | 30 | 37 | 8 | 6250 | 10.1 | 35 | 6 | 125k | 6.3 | 31 | 2 |
4 (b) | 1050 | 10.3 | 155k | 5.2 |