Table 3 The results of the Cu 2p3/2 peaks, the binding energy, the FWHM and the area of the fitting peaks
Etching time (min) | Binding energy of Cu 2p3/2 (eV) | FWHM of Cu 2p3/2 | Area of Cu 2p3/2 by fitting | |||
|---|---|---|---|---|---|---|
Peak 1 | Peak 2 | Peak 1 | Peak 2 | Peak 1 | Peak 2 | |
Sample 1 | ||||||
0 | 933.1 | / | 2.2 | / | 3916.5 | / |
3 | 932.4 | 933.5 | 1.1 | 1.3 | 67,497.1 | 7547.9 |
5 | 932.3 | 933.4 | 1.2 | 1.7 | 85,220.7 | 11,211.1 |
10 | 932.5 | 933.5 | 1.2 | 1.5 | 86,567.6 | 7883.6 |
30 | 932.4 | 933.6 | 1.4 | 1.6 | 49,138.2 | 4904.3 |
Sample 2 | ||||||
0 | 932.9 | 935.4 | 2.2 | 2.2 | 6640.6 | 4345.4 |
3 | 932.5 | 933.6 | 1.13 | 1.3 | 60,449.3 | 5874.7 |
5 | 932.4 | 933.3 | 1.1 | 1.5 | 67,092.2 | 7969.4 |
10 | 932.4 | 933.5 | 1.2 | 1.7 | 54,918.9 | 10,134.7 |
30 | 932.4 | 934.3 | 1.6 | 1.9 | 44,350.2 | 8970.3 |
Sample 3 | ||||||
0 | 933.1 | 933.9 | 1.53 | 2.1 | 7490.4 | 2783.0 |
3 | 932.4 | 933.4 | 1.16 | 1.5 | 88,595.2 | 12,306.4 |
5 | 932.5 | 933.4 | 1.12 | 2.1 | 90,576.9 | 25,037.4 |
10 | 932.5 | 933.4 | 1.11 | 1.4 | 92,586.9 | 8298.0 |
30 | 932.4 | 934.4 | 1.41 | 1.5 | 46,676.3 | 3942.7 |
