Fig. 1: Schematic diagram showing the fabrication process for the stretchable electronic devices.

a Depositing Al film on an elastomeric substrate by thermal evaporation via a metal stencil. b Removing the metal stencil from the elastomeric substrate. c Pre-stretching the elastomeric substrate. d Attaching an ultrathin electronic device onto the elastomeric substrate. e Releasing the pre-strained substrate to form stretchable electronic devices. f, g SEM images of the periodic Al film deposited onto the elastomeric substrate before and after stretching corresponding to b and c, respectively. Insets show enlarged SEM images for the periodic Al film deposited onto the elastomeric substrate before and after stretching