Fig. 3: Performance of symmetric microcavities, and comparison with state of the art.
From: Silicon microcavity arrays with open access and a finesse of half a million
a Finesse (green dots) and birefringence (blue squares) of all measured CC cavities. b Comparison of cooperativity C and photon lifetime for state-of-the-art microcavities ((a)23, (b)24, (c)25, (d)15, (e)26, (f)17, (g)18, (h)27, (i)9, and (j)28). Dashed lines indicate C(τ) for a constant finesse of F = 10pwith p = (3–6) (left to right) and varying L = R in a symmetric cavity. Light blue circles: micromachined SiO2. Black square: macroscopic SiO2 mirrors. Purple triangle: Buckled-dome cavities. Green dots: Silicon micromirrors, including the best results from this work, as indicated, for PC (left dot) and CC (right dot) configurations
