Fig. 2: In situ laser etching for the deterministic assembly of single-emitter plasmonic antenna nanostructures. | Light: Science & Applications

Fig. 2: In situ laser etching for the deterministic assembly of single-emitter plasmonic antenna nanostructures.

From: Extreme multiexciton emission from deterministically assembled single-emitter subwavelength plasmonic patch antennas

Fig. 2

Figures (a–e) illustrate the in situ laser etching protocol used to fabricate the antennas (see the details in the text). The image at the top right of (a) shows a confocal image of the emission from a QD, and the image on the top of (b) shows the AFM topography and height profile of a hole etched by the laser into the resist bi-layer. The undercut created by the selective etching of the LOR (c) allows the lift-off in step (d) of the lithography to produce the single-emitter antennas (e). The image above (e) depicts the AFM image and corresponding height profile of a fabricated antenna patch. f Emission lifetime of a QD before (blue) and after (red) laser etching

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