Fig. 4: Comparison of SUNDIAL with the traditional fitting technique. | Light: Science & Applications

Fig. 4: Comparison of SUNDIAL with the traditional fitting technique.

From: Machine learning powered ellipsometry

Fig. 4

a Residual on three typical materials of SUNDIAL (solid lines) and the traditional fitting technique (dashed lines). Both methods fit (Ψ, Δ) very well, while the traditional fitting method shows a significant error in fitting (R, T). b RMSE of the compared methods on more tested materials. SUNDIAL (solid dots) significantly outperformed the traditional fitting method (empty diamonds) in terms of overall accuracy. RMSEΨΔ = RMSEΨ + RMSEΔ, and RMSERT = RMSER + RMSET. c Effect of γ. Experiments with different γ values are conducted, and the RMSEs are shown here. Tungsten (W) is used here as an example

Back to article page