Fig. 12: Performance improvement methods on AlGaN MSM photodetectors.
From: Progress on AlGaN-based solar-blind ultraviolet photodetectors and focal plane arrays
a Schematic structure of AlGaN MSM photodetector with Al nanoparticles. b Electric field distribution of Al nanoparticles with changing gaps. c Responsivity of devices with and without Al nanoparticles. Reprinted with permission from Li et al.187. Copyright 2014 Optical Society of America. d Schematic structure of AlGaN with low-temperature AlN cap layer and recessed electrodes. e Dark current curves of the three samples. f Spectral response of the three samples. Reprinted with permission from Chen et al.188. Copyright 2010 The Japan Society of Applied Physics
