Fig. 14: Structure and performance of an AlGaN SAM APD.
From: Progress on AlGaN-based solar-blind ultraviolet photodetectors and focal plane arrays

a Schematic cross-sectional diagram of the SAM AlGaN APD. b I-V curve in dark and under illumination. Sidewall SEM images of APD with KOH (c) and photo-electrochemical (d) treatment, respectively. e Dark currents for samples with different treatments. f Spectral response at various applied voltages. g Dark currents at various temperatures. Reprinted with permission from Shao et al.224. Copyright 2014 IEEE