Fig. 18: 320 × 256 AlGaN UV FPAs and imaging technology.
From: Progress on AlGaN-based solar-blind ultraviolet photodetectors and focal plane arrays
a Schematic structure of the AlGaN photodetector. b Spectral response at 0 V. c Electrical arc discharge image from FPA camera. d Paper-cutout image from FPA camera. e SEM image of FPA with indium bump. f Schematic diagram of Imaging geometry. Reprinted with permission from McClintock et al.267. Copyright 2005 SPIE
