Fig. 4: AlGaN/AlN superlattice employed on the AlGaN growth.
From: Progress on AlGaN-based solar-blind ultraviolet photodetectors and focal plane arrays
Cross-section TEM images [vector: g = (0002)] showing screw-component TDs in n-Al0.55Ga0.45N with (a) and without (b) superlattice insertion. Reprinted with permission from Sun et al.108. Copyright 2005 American Institute of Physics
