Fig. 4: Microstructuring of transparent substrates by LIPAA. | Light: Science & Applications

Fig. 4: Microstructuring of transparent substrates by LIPAA.

From: Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Fig. 4

a AFM images of a grating fabricated on fused silica using a KrF excimer laser and a phase mask26. The grating shows a period of 1.06 μm and a clean and well-defined structure without any severe damage. b Two microfluidic device patterns fabricated on soda-lime glass substrate by LIPAA46, scale bar: 150 μm. Figure a reproduced with permission from ref. 26, ©Springer-Verlag 2003, and b reproduced with permission from ref. 46, ©2016 Elsevier B.V. All rights reserved

Back to article page