Fig. 5: The measured tangential mirror slope profile of the elliptical mirror with SAM and HDX Fizeau interferometer.
From: Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Each SAM dataset is labelled by its iris aperture D and subset window width w to demonstrate their effects on the spatial resolution. All SAM measurements use the same subset window length (l = 0.5 mm)