Fig. 2: In-plane InP sub-micron wires and membranes selectively grown on (001) SOI.
From: A monolithic InP/SOI platform for integrated photonics
a–d Optical microscope images of as-grown InP array with different pattern length: 500 nm, 1 µm, 5 µm, and 10 µm, respectively. Scale bar of a–d, 5 µm. e, f Top-view SEM image of as-grown sample at 1 µm patterned length area. Scale bar of e, f, 5 µm. g 52° tilted cross-sectional SEM image after focus-ion-beam cutting showing the in-plane InP laterally grown from Si. Scale bar, 2 µm. h 52° tilted SEM image of InP membrane grown by 10 µm pattern length after top oxide and Si removal. Scale bar, 2 µm
