Fig. 5: Laser demonstrations using the epitaxial InP sub-micron wires and membranes.
From: A monolithic InP/SOI platform for integrated photonics
a Optical microscope image of InP subwavelength wire lasers with 500 nm pattern length after top oxide and Si removal. Scale bar, 5 µm. b 52° tilted SEM image of InP subwavelength laser array on SOI by 500 nm pattern length. Scale bar, 5 µm. c 52° tilted SEM image of subwavelength lasers. Scale bar, 2 µm. d Top-view SEM image of the square cavity laser. Scale bar, 1 µm. e Schematic of process flow of micro-disk lasers. f 70° tilted SEM image of fabricated micro-disk laser on SOI. Scale bar, 500 nm
