Fig. 1: Monolithically sculpted vdW heterostructure NOEMS.
From: A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler
a–d Art view of the workflow for patterning suspended vdW heterostructure beams on h-BN cavities, with 2D functional materials involved, thus forming a NOEMS structure. e–f A typical test on the suspension of vdW heterostructure on pre-patterned h-BN holes, with a global top vdW layer (f) deposited onto (e). g A statistic on the success rate of suspension (at step 3 in Fig. 1) of h-BN/graphene heterostructure on h-BN cavities with different h-BN cavity depths. The different colors denote lateral sizes of the suspended areas. Ten samples were fabricated for each size for the statistic in (g)
