Fig. 5: Demonstration of a CrOCl/graphene vdW NOEMS using our technique.
From: A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler
a Bird view of SEM image of the CrOCl/graphene NOEMS array using the method described in Fig. 1, with the boxed region scanned by AFM. It is seen that the drum-like cavities (dashed circles in the AFM image) are invisible under AFM. Scale bar = 5 μm. b A cartoon illustration of the as-prepared of CrOCl/graphene NOEMS. c Color map showing the resonance frequency of the CrOCl/graphene NOEMS in the parameter space of frequency and magnetic fields at a temperature of 5 K. d Line profile of the resonance frequency f0 extracted from (c), as a function of magnetic field. Data were obtained in trace and retrace, with a magnetic phase transition from H1 to H3, with f0 blueshifts of about 0.8 MHz
