Fig. 2: Design and fabrication of a metagrating in GaAs for efficient wide-angle deflection. | Light: Science & Applications

Fig. 2: Design and fabrication of a metagrating in GaAs for efficient wide-angle deflection.

From: High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Fig. 2

a 3D render of the diffractive unit cell comprising the metagrating; b Calculated Hy field distribution of a metagrating in GaAs, deflecting normally incident plane wave to 60° in air with 75% total efficiency (96.1% relative to total transmittance); c SEM micrograph of the fabricated metagrating in GaAs; d Measured Fourier plane image (log10 intensity scale) and its cut at ky = 0 (linear intensity scale). Dashed lines mark kx/k = 0.95 (maximum collection angle) and kx/k = 0.866 (target deflection angle)

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