Fig. 3: An integrated metagrating efficiently quasi-collimating the VCSEL emission and deflecting to 60° in air.
From: High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy
a 3D render of the integrated metagrating concept; b SEM micrograph of the fabricated metagrating; c, d Simulated Fourier images of the curved metagrating illuminated by a plane wave (c) and a VCSEL (d) and their cuts at ky = 0; e Free space measurement of the VCSEL power distributed into the separate diffraction orders and relative deflection efficiency of the integrated metagrating; f Beam profiles of the first diffraction order in the xz and z’y-plane; g, h Measured Fourier images (log10 intensity scale) of the curved metagrating illuminated by a plane wave (g) and a VCSEL (h) and their cuts at ky = 0 (linear intensity scale); Dashed lines mark the kx/k = 0.95 (maximum collected angle) and kx/k = 0.866 (target deflection angle)
