Fig. 15: Holographic quantitative analysis tool of manufacturing.
From: Quantitative phase imaging based on holography: trends and new perspectives
The complex-amplitudes of reflection waves reveal the profiles and topography of precision manufacturing. a Imaging results of a standalone spiral with bright-field image, SEM image, and 3D RI tomogram404 b Measurement results on a groove sample measured height values compared to the reference value from calibration data and uncertainty of reference measurement as given by the manufacturer of the sample400. c Measurement results of a sealing sample. d The measurement results of 30 consecutive measurements of the sealing surface of an electric motor housing. e The 3D RI distribution of the laser-induced waveguides in borosilicate glass405. f The measurement of weak absorption thin liquid films with different thicknesses and surface morphology410
