Fig. 4: Electrical performance of pristine WS2 and N-WS2.

a OM image of the as-fabricated WS2 devices. Below the white dotted line is the implanted region, while above the white dotted line is the unimplanted region. The sample is divided into three parts denoted as channel 1-2 (N-WS2), channel 2-3 (lateral WS2 p-n homojunction), and channel 3-4 (pristine WS2). The scale bar is 10 μm. b Output characteristic curves of N-WS2 FET at gate voltage sweep from 0 V to −60 V with −20 V step. Output characteristic curves of (c) WS2 FET and (d) lateral WS2 p-n homojunction FET at gate voltage sweep of 0 V to 60 V with 20 V step. e Transfer characteristic curves of WS2 and N-WS2 (with implantation dose of 1 × 1014 ions cm−2) FETs at bias of 1 V in logarithmic scale. f Transfer characteristic curves comparison of WSe2 (blue curve) and N-WSe2 (red curve) FETs at bias of 1 V in logarithmic scale