Fig. 2: Anneal-free silicon nitride photonics integration process, thin and thick waveguides, and applications of each.
From: Anneal-free ultra-low loss silicon nitride integrated photonics
a Anneal-free fabrication flow. The loss regimes vary between thin to thick waveguides in (b) and (c) respectively. b Example applications that require the performance of dilute mode thin nitride waveguides, with absorption-dominated losses, include stimulated Brillouin lasers17, coil resonator reference cavities45, and cold atom trap beam delivery29,71. c Examples of applications that require the characteristics of strongly confining thick nitride waveguides, with higher scattering dominated losses, include microcombs and optical parametric oscillators (OPO) (this work), mid-IR photonics and gas sensing72, and supercontinuum generation56
