Fig. 5: Integrated beam deflector based on VCSELs.

a Schematic illustration of a coherent VCSEL array integrated with OPA for beam steering¹³⁵. b Schematic illustration of the integration of microfluidic channel with VCSEL to control the laser beam¹³⁶. c Schematic of a beam scanner based on the integration of VCSEL with slow light waveguide¹³⁷. Figure a and b are reprinted from refs. ¹³⁵. and ¹³⁶. respectively with permission from the Optica Publishing Group. Figure c is reprinted from ref. ¹³⁷. with permission from the Chinese Laser Press