Fig. 6: Integrated beam deflector achieved by integrating VCSELs with metasurfaces.

a On-chip 2D metasurface-integrated 8 × 8 VCSEL array allows for programmable beam steering with large deflection angle ranging from 0° to 60° (ref. ¹²²). b Schematic illustration of an oxide-confined bottom-emitting GaAs-VCSEL and its integration with a metagrating that enables high-angle deflection for high-contrast dark field and total internal reflection microscopy¹⁴². Figure a is reprinted from ref. ¹²². with permission from the John Wiley and Sons, Figure b is reprinted from ref. ¹⁴². with permission from the Springer Nature by CC BY 4.0