Fig. 9: Fabrication process flow of conical microlens optical fibres.

a A 3D-printed template with an array of conical grooves and 4 protruded ‘+‘ alignment markers at the corners. The enlarged view shows that the conical surface of each groove has a layered texture and is not smooth. b Polydimethylsiloxane (PDMS) is used to transfer patterns. c The first PDMS mould. d Physical vapour deposition (PVD) and electroplating. e Cu-coated mould. The inset shows that the layered texture is smoothened and the tip of the cone is rounded. f PDMS is used to transfer patterns again. g The second PDMS mould with conical grooves. h The same volume (~0.15 μL) of NOA81 liquid is deposited into each conical groove. i A 3D-printed optical fibre buncher with many through holes. j UV light is used to cure the conical microlenses on top of the optical fibres