Fig. 9: Influence of the grating-camera distance in cross-grating microscopy (CGM) on trueness and precision.

IF-DDA simulations of OPD images acquired with CGM, without (a) and with (b) noise. A cross-cut of the noisy images is displayed in the third raw. Each row corresponds to a different grating-camera distance, namely 0.2, 0.5, 0.86 and 1.2 mm. 0.86 mm corresponds to the common distance in CGM, measured on a commercial system