Fig. 1: Stacked chip’s schematic.
From: Using light to image millimeter wave based on stacked meta-MEMS chip

a Schematic diagram of the stacked meta-MEMS chip; b Diagram of the meta-MEMS pixel array
From: Using light to image millimeter wave based on stacked meta-MEMS chip

a Schematic diagram of the stacked meta-MEMS chip; b Diagram of the meta-MEMS pixel array