Fig. 2: Stacked pixels’ schematic.
From: Using light to image millimeter wave based on stacked meta-MEMS chip

a 2 × 2 pixels model of the lower and upper chips before stacking; b Schematic diagram of a meta-MEMS pixel
From: Using light to image millimeter wave based on stacked meta-MEMS chip
a 2 × 2 pixels model of the lower and upper chips before stacking; b Schematic diagram of a meta-MEMS pixel