Table 1 Comparison of nano-fabrication methods for diffractive optical processors
Methods | Maximum lateral size (μm) | Lateral feature size (nm) | Axial step size (nm) | Number of phase levels per feature | Number of independent phase features per chip | Wafer-level multi-layer fabrication |
|---|---|---|---|---|---|---|
<100 | ~300–400 | ~10–300 | >100 | <0.1 million | No | |
<200 | ~20–400 | ~20 | >100 | <1 million | No | |
Resin stamping53 | >1000 | 4000 | ~160 | 8 | <5 million | No |
>1000 | 3000 | ~125 | 16 | <4 million | No | |
This work | >1000 | 714 | ~100 | 16 | ~0.5 billion | Yes |
