Fig. 1
From: Shaping the light of VCSELs through cavity geometry design

Schematic of VCSELs and optical power measurement. a Schematic cross-sectional view of a 940-nm VCSEL wafer. b Scanning electron microscope (SEM) image of the VCSELs with five distinct cavity geometries: square (S-VCSEL), D-shaped (D-VCSEL), circular (O-VCSEL), pentagonal (P-VCSEL), and mushroom-shaped (M-VCSEL). c top-view images captured after oxidation process of each VCSEL. d–h Light-current density (L-J) characteristics of VCSELs with varying cavity geometries from the same cell. The insets display the respective geometrical designs