Fig. 3: Modulators based on MEMS metamaterials. | Microsystems & Nanoengineering

Fig. 3: Modulators based on MEMS metamaterials.

From: Integrating microsystems with metamaterials towards metadevices

Fig. 3

a The first MEMS tunable metamaterials enabled by thermal actuators for amplitude modulation87. b MEMS-actuated single-layer metamaterials for resonant frequency modulation92. c A dual-layer tunable metamaterial enabled by micromachined comb-drive actuators and its reconfigurable resonant response105. d A THz modulator operating at a modulation frequency of 40 kHz based on MEMS cantilever actuators88. The scale bars in (a), (b), and (d) are 10 μm. In (c), the unit cell of the metamaterial is 40 μm. a Reprinted with permission from ref. 87. Copyright 2009 by the American Physical Society. b Reprinted with permission from ref. 92. Copyright 2011 by John Wiley and Sons. c Reprinted with permission from ref. 105. Copyright 2016 by Springer Nature. d Reprinted with permission from ref. 108. Copyright 2014 by the Optical Society

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