Table 1 Performance comparison
Q-factor | Sensitivity (Hz/kPa) | Nonlinearity (%) | Temperature | Resonator type | Resonator number | |
|---|---|---|---|---|---|---|
Sun et al.12 | 10,000 | 29 | 0.02 | −40 to +80 °C | Capacitance | Single |
Du et al.6 | 22,795 | 20 | 0.21 | +30 to +75 °C | Capacitance | Single |
Yan et al.25 | 16,000 | 11.89 | 0.01 | −45 to +65 °C | Piezoresistance | Double |
Zhang et al.26 | – | 36.58 | 0.014 | −20 to +60 °C | Quartz | Triple |
This paper | 27,650 | 19 | 0.02 | −40 to 85 °C | Piezoresistive | Single |
