Fig. 1: Pressure sensor and readout circuitry.
From: Sensitive capacitive pressure sensors based on graphene membrane arrays
a Optical image of the sensor chip with 10,000 circular holes, a DLG/PMMA membrane and Ti/Au electrodes. The close-up image shows the difference in contrast between intact and defect drums, with red circles indicating collapsed membranes. b Schematic device cross-section and capacitive pressure readout principle. c Readout circuitry PCB board, with the elements labeled. The total size of the PCB board is \(6.9 \,\times 17.5\) cm2. The red circle indicates the pressure sensor chip
