Fig. 8: Hollow microneedles for microfluidic drug delivery.

a The first hollow microneedles were developed in silicon for in vivo neural recordings. Adapted with permission from ref. 185. b The first transdermal hollow microneedles, also developed in silicon. Adapted with permission from ref. 193. c–i Various hollow silicon microneedles. c Adapted with permission from ref. 194. d Adapted with permission from ref. 196. e Adapted with permission from ref. 198. f Figure contributed by J.G.E. Gardeniers and A. van der Berg. g Adapted with permission from ref. 200. h Adapted with permission from ref. 201. i Adapted with permission from ref. 202. j PMMA hollow microneedles fabricated by the LIGA process. Adapted with permission from ref. 203. k Polymer hollow microneedles by 3M. The material and fabrication process are proprietary. Adapted with permission from ref. 205