Fig. 2: Computational methods for mode frequency identification and Qanchor calculation.
From: Deep learning for non-parameterized MEMS structural design
a–d The mode shapes (top row) and ranking distribution of directional effective mass components (bottom row) of the disk resonator in its first four modes. The rankings are ascending with the given \(m_{\alpha i}^{{{{\mathrm{eff}}}}}\) among the 10 earliest appearing modes. e Schematic of the finite element simulation to estimate Qanchor using the infinite element method. Different colors on the resonator structures in a-e represent normalized out-of-plane displacement magnitudes in the mode shapes. f The frequency-amplitude response of the sample resonator structure.
