Table 1 Parameters of the square PMUTs

From: A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

PMUT layer

Material

Side (μm)

Thickness (μm)

Top electrode

Mo

140

0.2

Piezoelectric layer

ScAlN

–

1

Bottom electrode

Mo

–

0.2

Substrate

Si

–

4.5

SiO2

–

1

Cavity

–

180

15

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