Table 2 Comparison of the effective electromechanical coupling coefficients between the device in this paper and other reported PMUT devices

From: A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

 

Resonance frequency

Piezoelectric material

Electromechanical coupling coefficient

Zhu et al.24

2.13 MHz

AlN

0.84%

Ledesma et al.53

4.866 MHz

AlN

1.14%

Wang et al.23

17.77 MHz

ScAlN

1.9%

This work

1.996 MHz

ScAlN

1.38%

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