Table 3 Performance comparison between the developed miniaturized flowmeter and other MEMS-based flow sensors
MEMS-based flowmeter | Lee et al.47 | Sharma et al.48 | Nguyen et al.49 | This work |
|---|---|---|---|---|
Technology | Thermal | Piezoresistive | Capacitive | Piezoelectric |
Fluid type | Liquid | Water | Gas | Liquid |
Channel inner diameter | Φ1~Φ2 mm | 10 μm | 10.16 cm | Φ4 mm |
Measurement flow range | 0.1~100 mL/h | 0.09–3.07 m/s | −18 m/s | 0.033~5 L/min |
Relative indication error | ±5% | – | – | ±0.5% |
