Table 4 Performance comparison of the developed miniaturized flowmeter with commercial π-type channel flowmeters

From: A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications

π-type flowmeter

Sentronics FlowSonic LF50

Flow technology QLF51

Bradford engineering Ultrasonic Flow Meter52

This work

Technology

Piezoceramic

Piezoceramic

Piezoceramic

MEMS Piezoceramic

Channel inner diameter

Φ12.76 mm

Φ5.46 mm

Φ10 mm

Φ4 mm

Measurement flow range

0.008~4 L/min

0.0038~13.25 L/min

0.06~18 L/min

0.033~5 L/min

Measurement velocity range

0.001~0.521 m/s

0.0027~9.43 m/s

0.0127~3.8197 m/s

0.044~6.631 m/s

Relative indication error

±0.5%

±0.5%

±0.5%

±0.5%

Repeatability

±0.15%

±0.2%

N.A.

±1%

Turndown ratio

500

3500

300

160