Fig. 1: Design of the HFS.

a Structure of the designed sensor with integrated HFS and temperature sensors, where the HFS includes a thermoelectric layer, a thermal resistance layer, and temperature sensors distributed on the upper and lower surfaces of the substrate. b Principle of the thermal resistance HFS, which is similar to Ohm’s law in electricity. c Difference between a thermopile and a single thermocouple. When the thermopile consists of N pairs of thermocouples connected in series, the output electric potential of the thermopile is N times the output electric potential of a single pair of thermocouples