Fig. 4: Membrane eigenfrequency. | Microsystems & Nanoengineering

Fig. 4: Membrane eigenfrequency.

From: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

Fig. 4

First resonance frequency modes of the three different membranes are compared and fitted with Lorentz functions. The insets show stroboscopic topography data of the +z membrane displacement through the venting holes. Below, is a Comsol simulation of the mode-shapes of each of the geometries for different pre-tensions to match the experimental resonance frequencies

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