Fig. 1: Introduction to the manufacturing methods and mechanical design of microhemispherical shell resonators.

a An overview of μHSR manufacturing methods. Conventional manufacturing methods typically require 8–12 steps to fabricate the hemispherical shell, approximately 3 steps to fabricate the electrodes, and finally an alignment assembly process to obtain the μHSR. In contrast, our method involves only two steps: finish molding and assembling the hemispherical shell and electrodes. b Description of the overall structure of our μHSR. Parameter indications of a hemispherical shell with a central anchor stem and a schematic diagram of a capacitive air gap formed between a single electrode and the hemispherical shell are shown in the partial diagram. c Histogram of the yield rate with different capacitive air gaps. The top of each bar chart shows the corresponding capacitive air gap images (the left three insets (i) are taken by SEM showing that the electrodes adhere to the hemispherical shell, and the right three insets (ii) are taken by electron microscopy showing the size of the capacitive air gap)