Fig. 4: Q-factor analysis of μHSRs. | Microsystems & Nanoengineering

Fig. 4: Q-factor analysis of μHSRs.

From: A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Fig. 4

a Comparison of the Q-factors between the metal-coated and uncoated μHSRs. b Step pattern images of the shell surface before and after sputtering. c Histogram of Q-factors extracted from the literature for different μHSRs at room temperature and atmospheric pressure (details and references are reported in Supplementary Table S1 and Supplementary Note 3). The Q-factors of μHSRs are divided according to the material of the shell

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