Fig. 5: Electrical properties of μHSRs. | Microsystems & Nanoengineering

Fig. 5: Electrical properties of μHSRs.

From: A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Fig. 5

a Box plot of the surrounding eight capacitors (carrier frequency: 10 kHz, sampling rate: 10 Hz, sampling time: 10 s). b Illustration of the electronic setup for resonance frequency measurements. c The \(m=2\) resonance peaks of the μHSR, measured at Vbias from 20 V to 40 V. d The frequency tuning curve of the \(m=2\) mode resonance of the μHSR by changing the electrostatic force, fitted with a quadratic equation. e Variation in the output voltage at different rotation rates with a sampling time of 10 s. f Open-loop scale factor measurement and fitting results of the μHRG

Back to article page