Fig. 2: The influence of DSMLA alignment error on the beam homogenization effect.

a Diagram of the principle of beam homogenization based on a DSMLA. b Optical simulation model of beam homogenization based on a DSMLA. Spot uniformity under different shift errors d of the DSMLA: c dx = 0, d dx = 1/4px, e dx = 1/2px, and f dy = 1/2py. g Variation in the light intensity. Spot uniformity under different rotation errors φ of the DSMLA: h φ = 1°, i φ = 3°, j φ = 5°, and k φ = 7°. l Variations in the light intensity