Fig. 2: Working principle, simulation and calculation results of the MEMS-tunable phase shifter. | Microsystems & Nanoengineering

Fig. 2: Working principle, simulation and calculation results of the MEMS-tunable phase shifter.

From: Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Fig. 2

a Working principle of the MEMS-tunable phase shifter. b Simulated optical response of the MEMS-tunable phase shifter versus lateral gap (insets: mode profiles at 50 and 200 nm lateral gaps). c Simulated resonance frequency of MEMS-tunable phase shifter. d Calculated voltage versus displacement of the lateral comb actuator

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