Fig. 4: Working principle, simulation and calculation results of the MEMS-tunable directional coupler. | Microsystems & Nanoengineering

Fig. 4: Working principle, simulation and calculation results of the MEMS-tunable directional coupler.

From: Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

Fig. 4

a Working principle of the MEMS-tunable directional coupler. b Simulated optical response of the MEMS-tunable directional coupler versus vertical offset. c Simulated natural frequency of the MEMS-tunable directional coupler. d Calculated response of the MEMS-tunable directional coupler

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